Editing Excimer laser (section)

{{short description|Type of ultraviolet laser important in chip manufacturing and eye surgery}}
[[File:Excimer laser 1.jpg|thumb|An excimer laser]]

An '''excimer laser''', sometimes more correctly called an '''exciplex laser''', is a form of [[ultraviolet]] [[laser]] which is commonly used in the production of [[microelectronic]] devices, [[semiconductor]] based [[integrated circuit]]s or "chips", [[eye surgery]], and [[microelectromechanical systems|micromachining]].

Since the 1960s, excimer lasers have been widely used in high-resolution [[photolithography]] machines, one of the critical technologies required for [[microelectronic]] chip manufacturing.