Editing Surface micromachining (section)

{{more footnotes|date=February 2018}}

'''Surface micromachining''' builds [[microstructure]]s by [[Nanoparticle deposition|deposition]] and etching structural layers over a [[substrate (materials science)|substrate]].<ref>{{cite journal |last=Bustillo |first=J.M. |author2=R.T. Howe |author3=R.S. Muller |date=August 1998 |title=Surface micromachining for microelectromechanical systems |journal=Proceedings of the IEEE |volume=86 |issue=8 |pages=1552–1574 |doi=10.1109/5.704260|citeseerx=10.1.1.120.4059 }}</ref> This is different from [[Bulk micromachining]], in which a [[silicon]] substrate [[Wafer (electronics)|wafer]] is selectively etched to produce structures.