Editing Ellipsometry (section)

==Etymology==
The name "ellipsometry" stems from the fact that [[elliptical polarization]] of light is used. The term "spectroscopic" relates to the fact that the information gained is a function of the light's wavelength or energy (spectra). The technique has been known at least since 1888 by the work of [[Paul Drude]]<ref>P. Drude, Ueber die Gesetze der Reflexion und Brechung des Lichtes an der Grenze absorbirender Krystalle, Annalen der Physik, Volume 268, Issue 12, 1887, Pages: 584–625, DOI: 10.1002/andp.18872681205; Ueber Oberflächenschichten. I. Theil, Annalen der Physik,  Volume 272, Issue 2, 1889, Pages: 532–560, DOI: 10.1002/andp.18892720214; Ueber Oberflächenschichten. II. Theil, Annalen der Physik, Volume 272, Issue 4, 1889, Pages: 865–897, DOI: 10.1002/andp.18892720409 (in German).</ref> and has many applications today.

The first documented use of the term "ellipsometry" was in 1945.<ref>{{Cite journal|last=Rothen|first=Alexandre|date=1945|title=The Ellipsometer, an Apparatus to Measure Thicknesses of Thin Surface Films|url=|journal=Review of Scientific Instruments|volume=16|issue=2|pages=26–30|doi=10.1063/1.1770315|bibcode=1945RScI...16...26R |issn=0034-6748}}</ref>{{Primary source inline|date=September 2021}}