Editing Microprobe (section)

==Types==
When the primary beam consists of accelerated electrons, the probe is termed an [[electron microprobe]], when the primary beam consists of accelerated ions, the term [[ion microprobe]] is used. The term microprobe may also be applied to [[optical]] analytical techniques, when the instrument is set up to analyse micro samples or micro areas of larger specimens. Such techniques include micro [[Raman spectroscopy]], micro [[infrared spectroscopy]] and micro [[LIBS]]. All of these techniques involve modified optical [[microscope]]s to locate the area to be analysed, direct the probe beam and collect the analytical signal.

A [[laser microprobe mass spectrometer|laser microprobe]] is a [[mass spectrometer]] that uses ionization by a pulsed laser and subsequent mass analysis of the generated ions.<ref name="HillenkampUnsöld1975">{{cite journal|last1=Hillenkamp|first1=F.|last2=Unsöld|first2=E.|last3=Kaufmann|first3=R.|last4=Nitsche|first4=R.|title=A high-sensitivity laser microprobe mass analyzer|journal=Applied Physics|volume=8|issue=4|year=1975|pages=341–348|issn=0340-3793|doi=10.1007/BF00898368|bibcode = 1975ApPhy...8..341H |s2cid=135753888}}</ref><ref name="DenoyerVan Grieken1982">{{cite journal|last1=Denoyer|first1=Eric.|last2=Van Grieken|first2=Rene.|last3=Adams|first3=Fred.|last4=Natusch|first4=David F. S.|title=Laser microprobe mass spectrometry. 1. Basic principles and performance characteristics|journal=Analytical Chemistry|volume=54|issue=1|year=1982|pages=26–41|issn=0003-2700|doi=10.1021/ac00238a001}}</ref><ref name="Van Vaeck1997">{{cite journal|last1=Van Vaeck|first1=L|title=Laser Microprobe Mass Spectrometry: Principle and Applications in Biology and Medicine|journal=Cell Biology International|volume=21|issue=10|year=1997|pages=635–648|issn=1065-6995|doi=10.1006/cbir.1997.0198|pmid=9693833|s2cid=7601994}}</ref>