Open main menu
Home
Random
Recent changes
Special pages
Community portal
Preferences
About Wikipedia
Disclaimers
Incubator escapee wiki
Search
User menu
Talk
Dark mode
Contributions
Create account
Log in
Editing
Planar process
(section)
Warning:
You are not logged in. Your IP address will be publicly visible if you make any edits. If you
log in
or
create an account
, your edits will be attributed to your username, along with other benefits.
Anti-spam check. Do
not
fill this in!
==Overview== The key concept is to view a circuit in its two-dimensional projection (a plane), thus allowing the use of [[photographic processing]] concepts such as film negatives to mask the projection of light exposed chemicals. This allows the use of a series of exposures on a substrate ([[silicon]]) to create [[silicon oxide]] (insulators) or doped regions (conductors). Together with the use of metallization, and the concepts of [[pβn junction isolation]] and [[surface passivation]], it is possible to create circuits on a single silicon crystal slice (a wafer) from a monocrystalline silicon boule. The process involves the basic procedures of [[silicon dioxide]] (SiO<sub>2</sub>) oxidation, SiO<sub>2</sub> etching and heat diffusion. The final steps involves [[Thermal oxidation|oxidizing]] the entire wafer with an SiO<sub>2</sub> layer, etching contact vias to the transistors, and depositing a covering metal layer over the [[oxide]], thus connecting the transistors without manually wiring them together.
Edit summary
(Briefly describe your changes)
By publishing changes, you agree to the
Terms of Use
, and you irrevocably agree to release your contribution under the
CC BY-SA 4.0 License
and the
GFDL
. You agree that a hyperlink or URL is sufficient attribution under the Creative Commons license.
Cancel
Editing help
(opens in new window)