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Surface-wave-sustained discharge
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==Theory== For a long time,{{when|date=April 2019}} [[microwave plasma|microwave]] [[plasma source]]s without a magnetic field were not considered suitable for the generation of high density plasmas. [[Electromagnetic wave]]s cannot propagate in [[over-dense plasma]]s. The wave is reflected at the plasma surface due to the [[skin effect]] and becomes an [[evanescent wave]]. Its penetration depth corresponds to the [[skin depth]] <math>\delta</math>, which can be approximated by :<math>\delta \simeq c\,\big/\sqrt{\omega_{p_e}^2 - \omega^2}. </math> The non-vanishing penetration depth of an evanescent wave opens an alternative way of heating a plasma: Instead of ''traversing'' the plasma, the conductivity of the plasma enables the wave to propagate ''along'' the plasma surface. The wave energy is then transferred to the plasma by an [[evanescent wave]] which enters the plasma perpendicular to its surface and [[exponential decay|decays exponentially]] with the [[skin depth]]. Transfer mechanism allows to generate [[over-dense plasma]]s with electron densities beyond the critical density.
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