Editing 90 nm process (section)

==Example: Elpida 90&nbsp;nm DDR2 SDRAM process==
[[Elpida Memory]]'s 90&nbsp;nm [[DDR2 SDRAM]] process.<ref>Elpida's presentation at Via Technology Forum 2005 and Elpida 2005 Annual Report</ref>

* Use of 300&nbsp;mm wafer size
* Use of KrF (248&nbsp;nm) lithography with [[optical proximity correction]]
* 512&nbsp;Mbit
* 1.8&nbsp;V operation
* Derivative of earlier 110&nbsp;nm and 100&nbsp;nm processes