Editing Biosensor (section)

==Biosensor MOSFET (BioFET)==
{{Main|Bio-FET}}

The MOSFET invented at Bell Labs between 1955 and 1960,<ref name=":0">{{Cite journal |last1=Huff |first1=Howard |last2=Riordan |first2=Michael |date=2007-09-01 |title=Frosch and Derick: Fifty Years Later (Foreword) |url=https://iopscience.iop.org/article/10.1149/2.F02073IF |journal=The Electrochemical Society Interface |volume=16 |issue=3 |pages=29 |doi=10.1149/2.F02073IF |issn=1064-8208|url-access=subscription }}</ref><ref>{{Cite journal |last1=Frosch |first1=C. J. |last2=Derick |first2=L |date=1957 |title=Surface Protection and Selective Masking during Diffusion in Silicon |url=https://iopscience.iop.org/article/10.1149/1.2428650 |journal=Journal of the Electrochemical Society |language=en |volume=104 |issue=9 |pages=547 |doi=10.1149/1.2428650|url-access=subscription }}</ref><ref>{{Cite journal |last=KAHNG |first=D. |date=1961 |title=Silicon-Silicon Dioxide Surface Device |url=https://doi.org/10.1142/9789814503464_0076 |journal=Technical Memorandum of Bell Laboratories |pages=583–596 |doi=10.1142/9789814503464_0076 |isbn=978-981-02-0209-5|url-access=subscription }}</ref><ref>{{Cite book |last=Lojek |first=Bo |title=History of Semiconductor Engineering |date=2007 |publisher=Springer-Verlag Berlin Heidelberg |isbn=978-3-540-34258-8 |location=Berlin, Heidelberg |page=321}}</ref><ref>{{Cite journal |last1=Ligenza |first1=J.R. |last2=Spitzer |first2=W.G. |date=1960 |title=The mechanisms for silicon oxidation in steam and oxygen |url=https://linkinghub.elsevier.com/retrieve/pii/0022369760902195 |journal=Journal of Physics and Chemistry of Solids |language=en |volume=14 |pages=131–136 |bibcode=1960JPCS...14..131L |doi=10.1016/0022-3697(60)90219-5|url-access=subscription }}</ref><ref name="Lojek1202">{{cite book |last1=Lojek |first1=Bo |title=History of Semiconductor Engineering |date=2007 |publisher=[[Springer Science & Business Media]] |isbn=9783540342588 |page=120}}</ref> Later, [[Leland C. Clark]] and Champ Lyons invented the first biosensor in 1962.<ref name="Park">{{cite journal |last1=Park |first1=Jeho |last2=Nguyen |first2=Hoang Hiep |last3=Woubit |first3=Abdela |last4=Kim |first4=Moonil |s2cid=55557610 |title=Applications of Field-Effect Transistor (FET){{ndash}}Type Biosensors |journal=[[Applied Science and Convergence Technology]] |date=2014 |volume=23 |issue=2 |pages=61–71 |doi=10.5757/ASCT.2014.23.2.61 |issn=2288-6559|doi-access=free }}</ref><ref>{{cite journal |last1=Clark |first1=Leland C. |author1-link=Leland Clark |last2=Lyons |first2=Champ |title=Electrode Systems for Continuous Monitoring in Cardiovascular Surgery |journal=Annals of the New York Academy of Sciences |date=1962 |volume=102 |issue=1 |pages=29–45 |doi=10.1111/j.1749-6632.1962.tb13623.x |pmid=14021529 |issn=1749-6632 |bibcode=1962NYASA.102...29C|s2cid=33342483 }}</ref> [[Bio-FET|Biosensor MOSFETs]] (BioFETs) were later developed, and they have since been widely used to measure [[physics|physical]], [[chemistry|chemical]], [[biological]] and [[Biophysical environment|environmental]] parameters.<ref name="Bergveld">{{cite journal |last1=Bergveld |first1=Piet |author1-link=Piet Bergveld |title=The impact of MOSFET-based sensors |journal=Sensors and Actuators |date=October 1985 |volume=8 |issue=2 |pages=109–127 |doi=10.1016/0250-6874(85)87009-8 |url=https://core.ac.uk/download/pdf/11473091.pdf |issn=0250-6874 |bibcode=1985SeAc....8..109B |access-date=9 October 2019 |archive-date=26 April 2021 |archive-url=https://web.archive.org/web/20210426192332/https://core.ac.uk/download/pdf/11473091.pdf |url-status=dead }}</ref>

The first BioFET was the [[ion-sensitive field-effect transistor]] (ISFET), invented by [[Piet Bergveld]] for [[electrochemical]] and [[biological]] applications in 1970.<ref>{{cite journal|author=Chris Toumazou |author2=Pantelis Georgiou |url=https://www.researchgate.net/publication/260616066 |title=40 years of ISFET technology:From neuronal sensing to DNA sequencing |journal=[[Electronics Letters]] |date=December 2011 |volume=47 |pages=S7–S12 |doi=10.1049/el.2011.3231 |access-date=13 May 2016}}</ref><ref name="Bergveld1970">{{cite journal |last1=Bergveld |first1=P. |title=Development of an Ion-Sensitive Solid-State Device for Neurophysiological Measurements |journal=[[IEEE Transactions on Biomedical Engineering]] |date=January 1970 |volume=BME-17 |issue=1 |pages=70–71 |doi=10.1109/TBME.1970.4502688|pmid=5441220 }}</ref> the [[adsorption]] FET (ADFET) was [[patented]] by P.F. Cox in 1974, and a [[hydrogen]]-sensitive MOSFET was demonstrated by I. Lundstrom, M.S. Shivaraman, C.S. Svenson and L. Lundkvist in 1975.<ref name="Bergveld"/> The ISFET is a special type of MOSFET with a gate at a certain distance,<ref name="Bergveld"/> and where the [[metal gate]] is replaced by an [[ion]]-sensitive [[membrane]], [[electrolyte]] solution and [[reference electrode]].<ref name="Schoning">{{cite journal |last1=Schöning |first1=Michael J. |last2=Poghossian |first2=Arshak |title=Recent advances in biologically sensitive field-effect transistors (BioFETs) |journal=Analyst |date=10 September 2002 |volume=127 |issue=9 |pages=1137–1151 |doi=10.1039/B204444G |pmid=12375833 |bibcode=2002Ana...127.1137S |url=http://juser.fz-juelich.de/record/16078/files/12968.pdf |issn=1364-5528}}</ref> The ISFET is widely used in [[biomedical]] applications, such as the detection of [[DNA hybridization]], [[biomarker]] detection from [[blood]], [[antibody]] detection, [[glucose]] measurement, [[pH]] sensing, and [[genetic technology]].<ref name="Schoning"/>

By the mid-1980s, other BioFETs had been developed, including the [[gas sensor]] FET (GASFET), [[pressure sensor]] FET (PRESSFET), [[chemical field-effect transistor]] (ChemFET), [[ISFET|reference ISFET]] (REFET), enzyme-modified FET (ENFET) and immunologically modified FET (IMFET).<ref name="Bergveld"/> By the early 2000s, BioFETs such as the [[DNA field-effect transistor]] (DNAFET), [[Genetically modified|gene-modified]] FET (GenFET) and [[Membrane potential|cell-potential]] BioFET (CPFET) had been developed.<ref name="Schoning"/>