Editing Ellipsometry (section)

==Further reading==
* R. M. A. Azzam and N. M. Bashara, ''Ellipsometry and Polarized Light'', Elsevier Science Pub Co (1987) {{ISBN|0-444-87016-4}}
* A. Roeseler, ''Infrared Spectroscopic Ellipsometry'', Akademie-Verlag, Berlin (1990), {{ISBN|3-05-500623-2}}
* H. G. Tompkins, ''A Users's Guide to Ellipsometry'', Academic Press Inc, London (1993), {{ISBN|0-12-693950-0}}
* H. G. Tompkins and W. A. McGahan, ''Spectroscopic Ellipsometry and Reflectometry'', John Wiley & Sons Inc (1999) {{ISBN|0-471-18172-2}}
* I. Ohlidal and D. Franta, ''Ellipsometry of Thin Film Systems'', in Progress in Optics, vol. 41, ed. E. Wolf, Elsevier, Amsterdam, 2000, pp.&nbsp;181–282
* M. Schubert, ''Infrared Ellipsometry on semiconductor layer structures: Phonons, Plasmons, and Polaritons'', Series: Springer Tracts in Modern Physics, Vol. 209, Springer (2004), {{ISBN|3-540-23249-4}}
* H. G. Tompkins and E. A. Irene (Editors), ''Handbook of Ellipsometry'' William Andrews Publications, Norwich, NY (2005), {{ISBN|0-8155-1499-9}}
* H. Fujiwara, '' Spectroscopic Ellipsometry: Principles and Applications'', John Wiley & Sons Inc (2007), {{ISBN|0-470-01608-6}}
* M. Losurdo and K. Hingerl (Editors), ''Ellipsometry at the Nanoscale'', Springer (2013), {{ISBN|978-3-642-33955-4}}
* K. Hinrichs and K.-J. Eichhorn (Editors), ''Ellipsometry of Functional Organic Surfaces and Films'', Springer (2014), {{ISBN|978-3-642-40128-2}}

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[[Category:Optical metrology]]
[[Category:Radiometry]]
[[Category:Spectroscopy]]