Editing Electron-beam lithography (section)

===Lenses===
Both electrostatic and magnetic lenses may be used. However, electrostatic lenses have more aberrations and so are not used for fine focusing. There is currently{{When|date=June 2019}} no mechanism to make achromatic electron beam lenses, so extremely narrow dispersions of the electron beam energy are needed for finest focusing.{{Citation needed|date=June 2019}}{{Update inline|date=June 2019|reason=}}