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Getter
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==Non-evaporable getters== {{main|Non-evaporable getter}} ''Non-evaporable getters'', which work at high temperature, generally consist of a film of a special alloy, often primarily [[zirconium]]; the requirement is that the alloy materials must form a passivation layer at room temperature which disappears when heated. Common alloys have names of the form St (Stabil) followed by a number: *St 707 is 70% [[zirconium]], 24.6% [[vanadium]], and the balance [[iron]]. *St 787 is 80.8% [[zirconium]], 14.2% [[cobalt]], and the balance [[mischmetal]]. *St 101 is 84% [[zirconium]] and 16% [[aluminium]].<ref>{{Cite web |url=http://www.patentstorm.us/patents/5961750-description.html |title=Nonevaporable getter alloys - US Patent 5961750 |access-date=2007-11-26 |archive-url=https://archive.today/20120911013426/http://www.patentstorm.us/patents/5961750-description.html |archive-date=2012-09-11 |url-status=dead }}</ref> In tubes used in electronics, the getter material coats plates within the tube which are heated in normal operation; when getters are used within more general vacuum systems, such as in [[semiconductor manufacturing]], they are introduced as separate pieces of equipment in the vacuum chamber, and turned on when needed. Deposited and patterned getter material is being used in microelectronics packaging to provide an ultra-high vacuum in a sealed cavity. To enhance the getter pumping capacity, the activation temperature must be maximized, considering the process limitations.<ref>[https://ieeexplore.ieee.org/abstract/document/8064729/ High-Q MEMS gyroscope]</ref> It is, of course, important not to heat the getter when the system is not already in a good vacuum.
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