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Surface micromachining
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== Examples == Surface Micro-machining can be seen in action in the following MEMS (Microelectromechanical) products: * Surface Micro-machined [[accelerometer]]s<ref>{{cite journal |last=Boser |first=B.E. |author2=R.T. Howe |date=March 1996 |title=Surface Micro-machined Accelerometers |journal=IEEE Journal of Solid-State Circuits |volume=31 |issue=3 |pages=366β375 |doi=10.1109/4.494198|bibcode=1996IJSSC..31..366B }}</ref> * 3D Flexible Multichannel Neural Probe [[array]]<ref>{{cite journal |last=Takeuchi |first=Shoji |author2=Takafumi Suzuki |author3=Kunihiko Mabuchi |author4=Hiroyuki Fujita|date=October 2003 |title=3D Flexible Multi-channel Neural Probe Array |journal=Journal of Micro-machines and Micro-engineering}}</ref> * [[Nanoelectromechanical relay]]s
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