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Reactive-ion etching
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==External links== *[https://cleanroom.byu.edu/rie-etching BYU Cleanroom β RIE Etching ] *[https://web.archive.org/web/20140512105821if_/http://www.oxfordplasma.de/process/sibo_1.htm Bosch Process] *[http://www.plasmaetch.com/reactive-ion-etching-systems-rie.php Reactive Ion Etching Systems] *[https://web.archive.org/web/20190508114314if_/https://www.purdue.edu/discoverypark/birck/files/Plasma_RIE_Etching_Fundamentals_and_Applications.pdf Plasma RIE Fundamentals and Applications] [[Category:Plasma processing]] [[Category:Semiconductor device fabrication]] [[Category:Etching (microfabrication)]]
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