Editing Planar process (section)

==External links==
*{{cite web |title=The silicon engine: A timeline of semiconductors in computing |url=http://www.computerhistory.org/semiconductor/timeline.html |work=Timeline: Browse by decade |publisher=Computer history museum |year=2012 |accessdate=2012-06-03}} A compendium of articles and other information on the development of [[integrated circuits]], including the [http://www.computerhistory.org/semiconductor/timeline/1955-Oxide.html development of oxide masking], [http://www.computerhistory.org/semiconductor/timeline/1955-Photolithography.html photolithography], the [http://www.computerhistory.org/semiconductor/timeline/1956-Silicon.html advent of silicon], the [http://www.computerhistory.org/semiconductor/timeline/1958-Miniaturized.html integrated circuit] and the [http://www.computerhistory.org/semiconductor/timeline/1959-invention-of-the-planar-manufacturing-process-24.html planar process]. 
*[https://web.archive.org/web/20070509230914/http://nobelprize.org/nobel_prizes/physics/articles/lecuyer/planar.html The Planar Process]
*{{cite web |title=The history of the integrated circuit |publisher=Nobelprize.org |year=2003 |url=https://www.nobelprize.org/educational/physics/integrated_circuit/history/index.html |accessdate=2012-06-03}} An overview of the steps in fabrication of an integrated circuit from the Nobel Prize website. This is a section of the work [https://www.nobelprize.org/educational/physics/integrated_circuit/index.html Techville: The integrated circuit].

{{DEFAULTSORT:Planar Process}}
[[Category:Semiconductor device fabrication]]
[[Category:Swiss inventions]]
[[Category:Planes (geometry)]]